Characterising Laser Processed Features using Luminescence Simulations in Quokka

Daniel Walter (Centre for Sustainable Energy Systems)

SOLAR SEMINAR SERIES

DATE: 2013-08-08
TIME: 16:00:00 - 17:00:00
LOCATION: Ian Ross Seminar Room
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ABSTRACT:
In this presentation we will discuss how the luminescence prediction function of Quokka 2.0 can be used to characterise sub-resolution features from luminescence images. By using an imaging technique for sample measurement, it is possible to characterise a broad parameter space on a single wafer. An example of a laser-doped aluminium diffusion will be presented, however the method of characterisation is applicable to a broad range of processing conditions. As relevant to the accurate extraction of luminescent signal rations, the impact of CCD-based photon spreading will be discussed and methods for mitigation presented.